5/9/2012	8:44:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2012	8:44:21 AM	Recipe started at 8:44 AM
5/9/2012	8:44:21 AM	Helium valve closed
5/9/2012	8:44:21 AM	H2 valve closed
5/9/2012	8:44:21 AM	BCl3 valve closed
5/9/2012	8:44:21 AM	PH3 valve closed
5/9/2012	8:44:21 AM	SiCl4 pre valve closed
5/9/2012	8:44:21 AM	SiCl4 post valve closed
5/9/2012	8:44:21 AM	Main Vac valve closed
5/9/2012	8:44:21 AM	Bypass valve closed
5/9/2012	8:44:21 AM	Bubbler valve closed
5/9/2012	8:44:21 AM	Helium MFC set to  0.000000
5/9/2012	8:44:21 AM	H2 MFC set to  0.000000
5/9/2012	8:44:21 AM	BCl3 MFC set to  0.000000
5/9/2012	8:44:21 AM	PH3 MFC set to  0.000000
5/9/2012	8:44:21 AM	SiCl4 MFC set to  0.000000
5/9/2012	8:44:21 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:44:21 AM	Tube furnace set to 0
5/9/2012	8:44:24 AM	H2 valve closed
5/9/2012	8:44:24 AM	BCl3 valve closed
5/9/2012	8:44:24 AM	PH3 valve closed
5/9/2012	8:44:24 AM	SiCl4 pre valve closed
5/9/2012	8:44:24 AM	SiCl4 post valve closed
5/9/2012	8:44:24 AM	Main Vac valve closed
5/9/2012	8:44:24 AM	Bypass valve closed
5/9/2012	8:44:24 AM	Bubbler valve closed
5/9/2012	8:44:24 AM	Helium valve opened
5/9/2012	8:44:24 AM	Helium MFC set to  500.000000
5/9/2012	8:44:24 AM	H2 MFC set to  0.000000
5/9/2012	8:44:24 AM	BCl3 MFC set to  0.000000
5/9/2012	8:44:24 AM	PH3 MFC set to  0.000000
5/9/2012	8:44:24 AM	SiCl4 MFC set to  0.000000
5/9/2012	8:44:24 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:44:24 AM	Tube furnace set to 0
5/9/2012	8:45:37 AM	Helium valve closed
5/9/2012	8:45:37 AM	H2 valve closed
5/9/2012	8:45:37 AM	BCl3 valve closed
5/9/2012	8:45:37 AM	PH3 valve closed
5/9/2012	8:45:37 AM	SiCl4 pre valve closed
5/9/2012	8:45:37 AM	SiCl4 post valve closed
5/9/2012	8:45:37 AM	Main Vac valve closed
5/9/2012	8:45:38 AM	Bypass valve closed
5/9/2012	8:45:38 AM	Bubbler valve closed
5/9/2012	8:45:38 AM	Helium MFC set to  0.000000
5/9/2012	8:45:38 AM	H2 MFC set to  0.000000
5/9/2012	8:45:38 AM	BCl3 MFC set to  0.000000
5/9/2012	8:45:38 AM	PH3 MFC set to  0.000000
5/9/2012	8:45:38 AM	SiCl4 MFC set to  0.000000
5/9/2012	8:45:38 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:45:38 AM	Tube furnace set to 0
5/9/2012	8:45:39 AM	Run finished at 8:45 AM
5/9/2012	8:45:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2012	8:54:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2012	8:54:12 AM	Recipe started at 8:54 AM
5/9/2012	8:54:12 AM	Helium valve closed
5/9/2012	8:54:12 AM	H2 valve closed
5/9/2012	8:54:12 AM	BCl3 valve closed
5/9/2012	8:54:12 AM	PH3 valve closed
5/9/2012	8:54:12 AM	SiCl4 pre valve closed
5/9/2012	8:54:12 AM	SiCl4 post valve closed
5/9/2012	8:54:12 AM	Main Vac valve closed
5/9/2012	8:54:12 AM	Bubbler valve closed
5/9/2012	8:54:12 AM	Bypass valve opened
5/9/2012	8:54:12 AM	Helium MFC set to  0.000000
5/9/2012	8:54:12 AM	H2 MFC set to  0.000000
5/9/2012	8:54:12 AM	BCl3 MFC set to  0.000000
5/9/2012	8:54:12 AM	PH3 MFC set to  0.000000
5/9/2012	8:54:12 AM	SiCl4 MFC set to  0.000000
5/9/2012	8:54:12 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:54:12 AM	Tube furnace set to 0
5/9/2012	8:55:23 AM	Helium valve closed
5/9/2012	8:55:23 AM	H2 valve closed
5/9/2012	8:55:23 AM	BCl3 valve closed
5/9/2012	8:55:23 AM	PH3 valve closed
5/9/2012	8:55:23 AM	SiCl4 pre valve closed
5/9/2012	8:55:23 AM	SiCl4 post valve closed
5/9/2012	8:55:23 AM	Main Vac valve closed
5/9/2012	8:55:23 AM	Bubbler valve closed
5/9/2012	8:55:23 AM	Bypass valve opened
5/9/2012	8:55:23 AM	Helium MFC set to  0.000000
5/9/2012	8:55:23 AM	H2 MFC set to  0.000000
5/9/2012	8:55:23 AM	BCl3 MFC set to  0.000000
5/9/2012	8:55:23 AM	PH3 MFC set to  0.000000
5/9/2012	8:55:23 AM	SiCl4 MFC set to  0.000000
5/9/2012	8:55:23 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:55:23 AM	Tube furnace set to 0
5/9/2012	8:56:23 AM	Helium valve closed
5/9/2012	8:56:23 AM	H2 valve closed
5/9/2012	8:56:23 AM	BCl3 valve closed
5/9/2012	8:56:23 AM	PH3 valve closed
5/9/2012	8:56:23 AM	SiCl4 pre valve closed
5/9/2012	8:56:23 AM	SiCl4 post valve closed
5/9/2012	8:56:23 AM	Bypass valve closed
5/9/2012	8:56:23 AM	Bubbler valve closed
5/9/2012	8:56:23 AM	Main Vac valve opened
5/9/2012	8:56:23 AM	Helium MFC set to  0.000000
5/9/2012	8:56:23 AM	H2 MFC set to  0.000000
5/9/2012	8:56:23 AM	BCl3 MFC set to  0.000000
5/9/2012	8:56:23 AM	PH3 MFC set to  0.000000
5/9/2012	8:56:23 AM	SiCl4 MFC set to  0.000000
5/9/2012	8:56:23 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:56:23 AM	Tube furnace set to 0
5/9/2012	8:56:24 AM	Run finished at 8:56 AM
5/9/2012	8:56:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2012	10:54:24 AM	Main Vac valve closed
5/9/2012	10:54:37 AM	Main Vac valve opened
5/9/2012	10:56:27 AM	Recipe started at 10:56 AM
5/9/2012	10:56:27 AM	Helium valve closed
5/9/2012	10:56:27 AM	H2 valve closed
5/9/2012	10:56:27 AM	BCl3 valve closed
5/9/2012	10:56:27 AM	PH3 valve closed
5/9/2012	10:56:27 AM	SiCl4 pre valve closed
5/9/2012	10:56:27 AM	SiCl4 post valve closed
5/9/2012	10:56:27 AM	Bypass valve closed
5/9/2012	10:56:27 AM	Bubbler valve closed
5/9/2012	10:56:27 AM	Main Vac valve opened
5/9/2012	10:56:27 AM	Helium MFC set to  0.000000
5/9/2012	10:56:27 AM	H2 MFC set to  0.000000
5/9/2012	10:56:27 AM	BCl3 MFC set to  0.000000
5/9/2012	10:56:27 AM	PH3 MFC set to  0.000000
5/9/2012	10:56:27 AM	SiCl4 MFC set to  0.000000
5/9/2012	10:56:27 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:56:27 AM	Tube furnace set to 0
5/9/2012	10:56:30 AM	Helium valve closed
5/9/2012	10:56:30 AM	H2 valve closed
5/9/2012	10:56:30 AM	BCl3 valve closed
5/9/2012	10:56:30 AM	PH3 valve closed
5/9/2012	10:56:30 AM	SiCl4 pre valve closed
5/9/2012	10:56:30 AM	SiCl4 post valve closed
5/9/2012	10:56:30 AM	Main Vac valve closed
5/9/2012	10:56:30 AM	Bypass valve closed
5/9/2012	10:56:30 AM	Bubbler valve closed
5/9/2012	10:56:30 AM	Helium MFC set to  0.000000
5/9/2012	10:56:30 AM	H2 MFC set to  0.000000
5/9/2012	10:56:30 AM	BCl3 MFC set to  0.000000
5/9/2012	10:56:30 AM	PH3 MFC set to  0.000000
5/9/2012	10:56:30 AM	SiCl4 MFC set to  0.000000
5/9/2012	10:56:30 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:56:30 AM	Tube furnace set to 0
5/9/2012	10:56:33 AM	Helium valve closed
5/9/2012	10:56:33 AM	BCl3 valve closed
5/9/2012	10:56:33 AM	PH3 valve closed
5/9/2012	10:56:33 AM	SiCl4 pre valve closed
5/9/2012	10:56:33 AM	SiCl4 post valve closed
5/9/2012	10:56:33 AM	Main Vac valve closed
5/9/2012	10:56:33 AM	Bypass valve closed
5/9/2012	10:56:33 AM	Bubbler valve closed
5/9/2012	10:56:33 AM	H2 valve opened
5/9/2012	10:56:33 AM	Helium MFC set to  0.000000
5/9/2012	10:56:33 AM	H2 MFC set to  500.000000
5/9/2012	10:56:33 AM	BCl3 MFC set to  0.000000
5/9/2012	10:56:33 AM	PH3 MFC set to  0.000000
5/9/2012	10:56:33 AM	SiCl4 MFC set to  0.000000
5/9/2012	10:56:33 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:56:33 AM	Tube furnace set to 0
5/9/2012	10:57:50 AM	Helium valve closed
5/9/2012	10:57:50 AM	BCl3 valve closed
5/9/2012	10:57:50 AM	PH3 valve closed
5/9/2012	10:57:50 AM	SiCl4 pre valve closed
5/9/2012	10:57:50 AM	SiCl4 post valve closed
5/9/2012	10:57:50 AM	Main Vac valve closed
5/9/2012	10:57:50 AM	Bypass valve closed
5/9/2012	10:57:50 AM	H2 valve opened
5/9/2012	10:57:50 AM	Bubbler valve opened
5/9/2012	10:57:50 AM	Helium MFC set to  0.000000
5/9/2012	10:57:50 AM	H2 MFC set to  500.000000
5/9/2012	10:57:50 AM	BCl3 MFC set to  0.000000
5/9/2012	10:57:50 AM	PH3 MFC set to  0.000000
5/9/2012	10:57:50 AM	SiCl4 MFC set to  0.000000
5/9/2012	10:57:50 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:57:50 AM	Tube furnace set to 0
5/9/2012	10:57:51 AM	Helium valve closed
5/9/2012	10:57:51 AM	BCl3 valve closed
5/9/2012	10:57:51 AM	PH3 valve closed
5/9/2012	10:57:51 AM	SiCl4 pre valve closed
5/9/2012	10:57:51 AM	SiCl4 post valve closed
5/9/2012	10:57:51 AM	Main Vac valve closed
5/9/2012	10:57:51 AM	Bypass valve closed
5/9/2012	10:57:51 AM	H2 valve opened
5/9/2012	10:57:51 AM	Bubbler valve opened
5/9/2012	10:57:51 AM	Helium MFC set to  0.000000
5/9/2012	10:57:51 AM	H2 MFC set to  500.000000
5/9/2012	10:57:51 AM	BCl3 MFC set to  0.000000
5/9/2012	10:57:51 AM	PH3 MFC set to  0.000000
5/9/2012	10:57:51 AM	SiCl4 MFC set to  0.000000
5/9/2012	10:57:51 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:57:51 AM	Tube furnace set to 1000
5/9/2012	11:22:51 AM	Helium valve closed
5/9/2012	11:22:51 AM	PH3 valve closed
5/9/2012	11:22:51 AM	Main Vac valve closed
5/9/2012	11:22:51 AM	Bypass valve closed
5/9/2012	11:22:51 AM	H2 valve opened
5/9/2012	11:22:51 AM	BCl3 valve opened
5/9/2012	11:22:51 AM	SiCl4 pre valve opened
5/9/2012	11:22:51 AM	SiCl4 post valve opened
5/9/2012	11:22:51 AM	Bubbler valve opened
5/9/2012	11:22:51 AM	Helium MFC set to  0.000000
5/9/2012	11:22:51 AM	H2 MFC set to  450.000000
5/9/2012	11:22:51 AM	BCl3 MFC set to  1.000000
5/9/2012	11:22:51 AM	PH3 MFC set to  0.000000
5/9/2012	11:22:51 AM	SiCl4 MFC set to  50.000000
5/9/2012	11:22:51 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	11:22:52 AM	Tube furnace set to 1000
5/9/2012	11:55:51 AM	Helium valve closed
5/9/2012	11:55:51 AM	BCl3 valve closed
5/9/2012	11:55:51 AM	Main Vac valve closed
5/9/2012	11:55:52 AM	Bypass valve closed
5/9/2012	11:55:52 AM	H2 valve opened
5/9/2012	11:55:52 AM	PH3 valve opened
5/9/2012	11:55:52 AM	SiCl4 pre valve opened
5/9/2012	11:55:52 AM	SiCl4 post valve opened
5/9/2012	11:55:52 AM	Bubbler valve opened
5/9/2012	11:55:52 AM	Helium MFC set to  0.000000
5/9/2012	11:55:52 AM	H2 MFC set to  430.000000
5/9/2012	11:55:52 AM	BCl3 MFC set to  0.000000
5/9/2012	11:55:52 AM	PH3 MFC set to  20.000000
5/9/2012	11:55:52 AM	SiCl4 MFC set to  50.000000
5/9/2012	11:55:52 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	11:55:52 AM	Tube furnace set to 1000
5/9/2012	11:57:52 AM	Helium valve closed
5/9/2012	11:57:52 AM	BCl3 valve closed
5/9/2012	11:57:52 AM	PH3 valve closed
5/9/2012	11:57:52 AM	SiCl4 pre valve closed
5/9/2012	11:57:52 AM	SiCl4 post valve closed
5/9/2012	11:57:52 AM	Main Vac valve closed
5/9/2012	11:57:52 AM	Bypass valve closed
5/9/2012	11:57:52 AM	H2 valve opened
5/9/2012	11:57:52 AM	Bubbler valve opened
5/9/2012	11:57:52 AM	Helium MFC set to  0.000000
5/9/2012	11:57:52 AM	H2 MFC set to  500.000000
5/9/2012	11:57:52 AM	BCl3 MFC set to  0.000000
5/9/2012	11:57:52 AM	PH3 MFC set to  0.000000
5/9/2012	11:57:52 AM	SiCl4 MFC set to  0.000000
5/9/2012	11:57:52 AM	Bypass solenoid MFC set to  0.000000
5/9/2012	11:57:52 AM	Tube furnace set to 750
5/9/2012	12:12:52 PM	H2 valve closed
5/9/2012	12:12:52 PM	BCl3 valve closed
5/9/2012	12:12:52 PM	PH3 valve closed
5/9/2012	12:12:52 PM	SiCl4 pre valve closed
5/9/2012	12:12:52 PM	SiCl4 post valve closed
5/9/2012	12:12:52 PM	Main Vac valve closed
5/9/2012	12:12:52 PM	Bypass valve closed
5/9/2012	12:12:52 PM	Helium valve opened
5/9/2012	12:12:52 PM	Bubbler valve opened
5/9/2012	12:12:52 PM	Helium MFC set to  500.000000
5/9/2012	12:12:52 PM	H2 MFC set to  0.000000
5/9/2012	12:12:52 PM	BCl3 MFC set to  0.000000
5/9/2012	12:12:52 PM	PH3 MFC set to  0.000000
5/9/2012	12:12:52 PM	SiCl4 MFC set to  0.000000
5/9/2012	12:12:52 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	12:12:52 PM	Tube furnace set to 0
5/9/2012	12:32:52 PM	Helium valve closed
5/9/2012	12:32:52 PM	H2 valve closed
5/9/2012	12:32:52 PM	BCl3 valve closed
5/9/2012	12:32:52 PM	PH3 valve closed
5/9/2012	12:32:52 PM	SiCl4 pre valve closed
5/9/2012	12:32:52 PM	SiCl4 post valve closed
5/9/2012	12:32:52 PM	Main Vac valve closed
5/9/2012	12:32:52 PM	Bypass valve closed
5/9/2012	12:32:52 PM	Bubbler valve closed
5/9/2012	12:32:52 PM	Helium MFC set to  0.000000
5/9/2012	12:32:52 PM	H2 MFC set to  0.000000
5/9/2012	12:32:52 PM	BCl3 MFC set to  0.000000
5/9/2012	12:32:52 PM	PH3 MFC set to  0.000000
5/9/2012	12:32:52 PM	SiCl4 MFC set to  0.000000
5/9/2012	12:32:52 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	12:32:53 PM	Tube furnace set to 0
5/9/2012	12:52:53 PM	Helium valve closed
5/9/2012	12:52:53 PM	H2 valve closed
5/9/2012	12:52:53 PM	BCl3 valve closed
5/9/2012	12:52:53 PM	PH3 valve closed
5/9/2012	12:52:53 PM	SiCl4 pre valve closed
5/9/2012	12:52:53 PM	SiCl4 post valve closed
5/9/2012	12:52:53 PM	Main Vac valve closed
5/9/2012	12:52:53 PM	Bubbler valve closed
5/9/2012	12:52:53 PM	Bypass valve opened
5/9/2012	12:52:53 PM	Helium MFC set to  0.000000
5/9/2012	12:52:53 PM	H2 MFC set to  0.000000
5/9/2012	12:52:53 PM	BCl3 MFC set to  0.000000
5/9/2012	12:52:53 PM	PH3 MFC set to  0.000000
5/9/2012	12:52:53 PM	SiCl4 MFC set to  0.000000
5/9/2012	12:52:53 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	12:52:53 PM	Tube furnace set to 0
5/9/2012	12:53:44 PM	Helium valve closed
5/9/2012	12:53:44 PM	H2 valve closed
5/9/2012	12:53:44 PM	BCl3 valve closed
5/9/2012	12:53:44 PM	PH3 valve closed
5/9/2012	12:53:44 PM	SiCl4 pre valve closed
5/9/2012	12:53:44 PM	SiCl4 post valve closed
5/9/2012	12:53:44 PM	Main Vac valve closed
5/9/2012	12:53:44 PM	Bubbler valve closed
5/9/2012	12:53:44 PM	Bypass valve opened
5/9/2012	12:53:44 PM	Helium MFC set to  0.000000
5/9/2012	12:53:44 PM	H2 MFC set to  0.000000
5/9/2012	12:53:44 PM	BCl3 MFC set to  0.000000
5/9/2012	12:53:44 PM	PH3 MFC set to  0.000000
5/9/2012	12:53:44 PM	SiCl4 MFC set to  0.000000
5/9/2012	12:53:44 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	12:53:44 PM	Tube furnace set to 0
5/9/2012	12:54:44 PM	Helium valve closed
5/9/2012	12:54:44 PM	H2 valve closed
5/9/2012	12:54:44 PM	BCl3 valve closed
5/9/2012	12:54:44 PM	PH3 valve closed
5/9/2012	12:54:44 PM	SiCl4 pre valve closed
5/9/2012	12:54:44 PM	SiCl4 post valve closed
5/9/2012	12:54:44 PM	Bypass valve closed
5/9/2012	12:54:44 PM	Bubbler valve closed
5/9/2012	12:54:44 PM	Main Vac valve opened
5/9/2012	12:54:44 PM	Helium MFC set to  0.000000
5/9/2012	12:54:44 PM	H2 MFC set to  0.000000
5/9/2012	12:54:44 PM	BCl3 MFC set to  0.000000
5/9/2012	12:54:44 PM	PH3 MFC set to  0.000000
5/9/2012	12:54:44 PM	SiCl4 MFC set to  0.000000
5/9/2012	12:54:44 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	12:54:44 PM	Tube furnace set to 0
5/9/2012	1:14:18 PM	Run finished at 1:14 PM
5/9/2012	1:14:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2012	1:14:26 PM	Recipe started at 1:14 PM
5/9/2012	1:14:26 PM	Helium valve closed
5/9/2012	1:14:26 PM	H2 valve closed
5/9/2012	1:14:26 PM	BCl3 valve closed
5/9/2012	1:14:26 PM	PH3 valve closed
5/9/2012	1:14:26 PM	SiCl4 pre valve closed
5/9/2012	1:14:26 PM	SiCl4 post valve closed
5/9/2012	1:14:26 PM	Main Vac valve closed
5/9/2012	1:14:26 PM	Bypass valve closed
5/9/2012	1:14:26 PM	Bubbler valve closed
5/9/2012	1:14:26 PM	Helium MFC set to  0.000000
5/9/2012	1:14:26 PM	H2 MFC set to  0.000000
5/9/2012	1:14:26 PM	BCl3 MFC set to  0.000000
5/9/2012	1:14:26 PM	PH3 MFC set to  0.000000
5/9/2012	1:14:26 PM	SiCl4 MFC set to  0.000000
5/9/2012	1:14:26 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	1:14:26 PM	Tube furnace set to 0
5/9/2012	1:14:29 PM	H2 valve closed
5/9/2012	1:14:29 PM	BCl3 valve closed
5/9/2012	1:14:29 PM	PH3 valve closed
5/9/2012	1:14:29 PM	SiCl4 pre valve closed
5/9/2012	1:14:29 PM	SiCl4 post valve closed
5/9/2012	1:14:29 PM	Main Vac valve closed
5/9/2012	1:14:29 PM	Bypass valve closed
5/9/2012	1:14:29 PM	Bubbler valve closed
5/9/2012	1:14:29 PM	Helium valve opened
5/9/2012	1:14:29 PM	Helium MFC set to  500.000000
5/9/2012	1:14:29 PM	H2 MFC set to  0.000000
5/9/2012	1:14:29 PM	BCl3 MFC set to  0.000000
5/9/2012	1:14:29 PM	PH3 MFC set to  0.000000
5/9/2012	1:14:29 PM	SiCl4 MFC set to  0.000000
5/9/2012	1:14:29 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	1:14:30 PM	Tube furnace set to 0
5/9/2012	1:15:39 PM	Helium valve closed
5/9/2012	1:15:39 PM	H2 valve closed
5/9/2012	1:15:39 PM	BCl3 valve closed
5/9/2012	1:15:39 PM	PH3 valve closed
5/9/2012	1:15:39 PM	SiCl4 pre valve closed
5/9/2012	1:15:39 PM	SiCl4 post valve closed
5/9/2012	1:15:39 PM	Main Vac valve closed
5/9/2012	1:15:39 PM	Bypass valve closed
5/9/2012	1:15:39 PM	Bubbler valve closed
5/9/2012	1:15:39 PM	Helium MFC set to  0.000000
5/9/2012	1:15:39 PM	H2 MFC set to  0.000000
5/9/2012	1:15:39 PM	BCl3 MFC set to  0.000000
5/9/2012	1:15:39 PM	PH3 MFC set to  0.000000
5/9/2012	1:15:39 PM	SiCl4 MFC set to  0.000000
5/9/2012	1:15:39 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	1:15:40 PM	Tube furnace set to 0
5/9/2012	1:15:41 PM	Run finished at 1:15 PM
5/9/2012	1:15:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2012	1:22:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2012	1:22:15 PM	Recipe started at 1:22 PM
5/9/2012	1:22:15 PM	Helium valve closed
5/9/2012	1:22:15 PM	H2 valve closed
5/9/2012	1:22:15 PM	BCl3 valve closed
5/9/2012	1:22:15 PM	PH3 valve closed
5/9/2012	1:22:15 PM	SiCl4 pre valve closed
5/9/2012	1:22:15 PM	SiCl4 post valve closed
5/9/2012	1:22:15 PM	Main Vac valve closed
5/9/2012	1:22:15 PM	Bubbler valve closed
5/9/2012	1:22:15 PM	Bypass valve opened
5/9/2012	1:22:15 PM	Helium MFC set to  0.000000
5/9/2012	1:22:15 PM	H2 MFC set to  0.000000
5/9/2012	1:22:15 PM	BCl3 MFC set to  0.000000
5/9/2012	1:22:15 PM	PH3 MFC set to  0.000000
5/9/2012	1:22:15 PM	SiCl4 MFC set to  0.000000
5/9/2012	1:22:15 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	1:22:15 PM	Tube furnace set to 0
5/9/2012	1:23:24 PM	Helium valve closed
5/9/2012	1:23:24 PM	H2 valve closed
5/9/2012	1:23:24 PM	BCl3 valve closed
5/9/2012	1:23:24 PM	PH3 valve closed
5/9/2012	1:23:24 PM	SiCl4 pre valve closed
5/9/2012	1:23:24 PM	SiCl4 post valve closed
5/9/2012	1:23:24 PM	Main Vac valve closed
5/9/2012	1:23:24 PM	Bubbler valve closed
5/9/2012	1:23:24 PM	Bypass valve opened
5/9/2012	1:23:24 PM	Helium MFC set to  0.000000
5/9/2012	1:23:24 PM	H2 MFC set to  0.000000
5/9/2012	1:23:24 PM	BCl3 MFC set to  0.000000
5/9/2012	1:23:24 PM	PH3 MFC set to  0.000000
5/9/2012	1:23:24 PM	SiCl4 MFC set to  0.000000
5/9/2012	1:23:24 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	1:23:24 PM	Tube furnace set to 0
5/9/2012	1:24:25 PM	Helium valve closed
5/9/2012	1:24:25 PM	H2 valve closed
5/9/2012	1:24:25 PM	BCl3 valve closed
5/9/2012	1:24:25 PM	PH3 valve closed
5/9/2012	1:24:25 PM	SiCl4 pre valve closed
5/9/2012	1:24:25 PM	SiCl4 post valve closed
5/9/2012	1:24:25 PM	Bypass valve closed
5/9/2012	1:24:25 PM	Bubbler valve closed
5/9/2012	1:24:25 PM	Main Vac valve opened
5/9/2012	1:24:25 PM	Helium MFC set to  0.000000
5/9/2012	1:24:25 PM	H2 MFC set to  0.000000
5/9/2012	1:24:25 PM	BCl3 MFC set to  0.000000
5/9/2012	1:24:25 PM	PH3 MFC set to  0.000000
5/9/2012	1:24:25 PM	SiCl4 MFC set to  0.000000
5/9/2012	1:24:25 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	1:24:25 PM	Tube furnace set to 0
5/9/2012	1:24:26 PM	Run finished at 1:24 PM
5/9/2012	1:24:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2012	2:56:21 PM	Main Vac valve closed
5/9/2012	2:56:34 PM	Main Vac valve opened
5/9/2012	2:57:36 PM	Recipe started at 2:57 PM
5/9/2012	2:57:36 PM	Helium valve closed
5/9/2012	2:57:36 PM	H2 valve closed
5/9/2012	2:57:36 PM	BCl3 valve closed
5/9/2012	2:57:36 PM	PH3 valve closed
5/9/2012	2:57:36 PM	SiCl4 pre valve closed
5/9/2012	2:57:36 PM	SiCl4 post valve closed
5/9/2012	2:57:36 PM	Bypass valve closed
5/9/2012	2:57:36 PM	Bubbler valve closed
5/9/2012	2:57:36 PM	Main Vac valve opened
5/9/2012	2:57:36 PM	Helium MFC set to  0.000000
5/9/2012	2:57:36 PM	H2 MFC set to  0.000000
5/9/2012	2:57:36 PM	BCl3 MFC set to  0.000000
5/9/2012	2:57:36 PM	PH3 MFC set to  0.000000
5/9/2012	2:57:36 PM	SiCl4 MFC set to  0.000000
5/9/2012	2:57:36 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	2:57:36 PM	Tube furnace set to 0
5/9/2012	2:57:39 PM	Helium valve closed
5/9/2012	2:57:39 PM	H2 valve closed
5/9/2012	2:57:39 PM	BCl3 valve closed
5/9/2012	2:57:39 PM	PH3 valve closed
5/9/2012	2:57:39 PM	SiCl4 pre valve closed
5/9/2012	2:57:39 PM	SiCl4 post valve closed
5/9/2012	2:57:39 PM	Main Vac valve closed
5/9/2012	2:57:39 PM	Bypass valve closed
5/9/2012	2:57:39 PM	Bubbler valve closed
5/9/2012	2:57:39 PM	Helium MFC set to  0.000000
5/9/2012	2:57:39 PM	H2 MFC set to  0.000000
5/9/2012	2:57:39 PM	BCl3 MFC set to  0.000000
5/9/2012	2:57:39 PM	PH3 MFC set to  0.000000
5/9/2012	2:57:39 PM	SiCl4 MFC set to  0.000000
5/9/2012	2:57:39 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	2:57:40 PM	Tube furnace set to 0
5/9/2012	2:57:43 PM	Helium valve closed
5/9/2012	2:57:43 PM	BCl3 valve closed
5/9/2012	2:57:43 PM	PH3 valve closed
5/9/2012	2:57:43 PM	SiCl4 pre valve closed
5/9/2012	2:57:43 PM	SiCl4 post valve closed
5/9/2012	2:57:43 PM	Main Vac valve closed
5/9/2012	2:57:43 PM	Bypass valve closed
5/9/2012	2:57:43 PM	Bubbler valve closed
5/9/2012	2:57:43 PM	H2 valve opened
5/9/2012	2:57:43 PM	Helium MFC set to  0.000000
5/9/2012	2:57:43 PM	H2 MFC set to  500.000000
5/9/2012	2:57:43 PM	BCl3 MFC set to  0.000000
5/9/2012	2:57:43 PM	PH3 MFC set to  0.000000
5/9/2012	2:57:43 PM	SiCl4 MFC set to  0.000000
5/9/2012	2:57:43 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	2:57:43 PM	Tube furnace set to 0
5/9/2012	2:58:57 PM	Helium valve closed
5/9/2012	2:58:57 PM	BCl3 valve closed
5/9/2012	2:58:57 PM	PH3 valve closed
5/9/2012	2:58:57 PM	SiCl4 pre valve closed
5/9/2012	2:58:57 PM	SiCl4 post valve closed
5/9/2012	2:58:57 PM	Main Vac valve closed
5/9/2012	2:58:57 PM	Bypass valve closed
5/9/2012	2:58:57 PM	H2 valve opened
5/9/2012	2:58:57 PM	Bubbler valve opened
5/9/2012	2:58:57 PM	Helium MFC set to  0.000000
5/9/2012	2:58:57 PM	H2 MFC set to  500.000000
5/9/2012	2:58:57 PM	BCl3 MFC set to  0.000000
5/9/2012	2:58:57 PM	PH3 MFC set to  0.000000
5/9/2012	2:58:57 PM	SiCl4 MFC set to  0.000000
5/9/2012	2:58:57 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	2:58:58 PM	Tube furnace set to 0
5/9/2012	2:58:59 PM	Helium valve closed
5/9/2012	2:58:59 PM	BCl3 valve closed
5/9/2012	2:58:59 PM	PH3 valve closed
5/9/2012	2:58:59 PM	SiCl4 pre valve closed
5/9/2012	2:58:59 PM	SiCl4 post valve closed
5/9/2012	2:58:59 PM	Main Vac valve closed
5/9/2012	2:58:59 PM	Bypass valve closed
5/9/2012	2:58:59 PM	H2 valve opened
5/9/2012	2:58:59 PM	Bubbler valve opened
5/9/2012	2:58:59 PM	Helium MFC set to  0.000000
5/9/2012	2:58:59 PM	H2 MFC set to  500.000000
5/9/2012	2:58:59 PM	BCl3 MFC set to  0.000000
5/9/2012	2:58:59 PM	PH3 MFC set to  0.000000
5/9/2012	2:58:59 PM	SiCl4 MFC set to  0.000000
5/9/2012	2:58:59 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	2:58:59 PM	Tube furnace set to 1000
5/9/2012	3:23:59 PM	Helium valve closed
5/9/2012	3:23:59 PM	PH3 valve closed
5/9/2012	3:23:59 PM	Main Vac valve closed
5/9/2012	3:23:59 PM	Bypass valve closed
5/9/2012	3:23:59 PM	H2 valve opened
5/9/2012	3:23:59 PM	BCl3 valve opened
5/9/2012	3:23:59 PM	SiCl4 pre valve opened
5/9/2012	3:23:59 PM	SiCl4 post valve opened
5/9/2012	3:23:59 PM	Bubbler valve opened
5/9/2012	3:23:59 PM	Helium MFC set to  0.000000
5/9/2012	3:23:59 PM	H2 MFC set to  450.000000
5/9/2012	3:23:59 PM	BCl3 MFC set to  1.000000
5/9/2012	3:23:59 PM	PH3 MFC set to  0.000000
5/9/2012	3:23:59 PM	SiCl4 MFC set to  50.000000
5/9/2012	3:23:59 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	3:23:59 PM	Tube furnace set to 1000
5/9/2012	3:59:59 PM	Helium valve closed
5/9/2012	3:59:59 PM	BCl3 valve closed
5/9/2012	3:59:59 PM	Main Vac valve closed
5/9/2012	3:59:59 PM	Bypass valve closed
5/9/2012	3:59:59 PM	H2 valve opened
5/9/2012	3:59:59 PM	PH3 valve opened
5/9/2012	3:59:59 PM	SiCl4 pre valve opened
5/9/2012	3:59:59 PM	SiCl4 post valve opened
5/9/2012	3:59:59 PM	Bubbler valve opened
5/9/2012	3:59:59 PM	Helium MFC set to  0.000000
5/9/2012	3:59:59 PM	H2 MFC set to  430.000000
5/9/2012	3:59:59 PM	BCl3 MFC set to  0.000000
5/9/2012	3:59:59 PM	PH3 MFC set to  20.000000
5/9/2012	3:59:59 PM	SiCl4 MFC set to  50.000000
5/9/2012	3:59:59 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	3:59:59 PM	Tube furnace set to 1000
5/9/2012	4:01:59 PM	Helium valve closed
5/9/2012	4:01:59 PM	BCl3 valve closed
5/9/2012	4:01:59 PM	PH3 valve closed
5/9/2012	4:01:59 PM	SiCl4 pre valve closed
5/9/2012	4:01:59 PM	SiCl4 post valve closed
5/9/2012	4:01:59 PM	Main Vac valve closed
5/9/2012	4:01:59 PM	Bypass valve closed
5/9/2012	4:01:59 PM	H2 valve opened
5/9/2012	4:01:59 PM	Bubbler valve opened
5/9/2012	4:01:59 PM	Helium MFC set to  0.000000
5/9/2012	4:01:59 PM	H2 MFC set to  500.000000
5/9/2012	4:01:59 PM	BCl3 MFC set to  0.000000
5/9/2012	4:01:59 PM	PH3 MFC set to  0.000000
5/9/2012	4:01:59 PM	SiCl4 MFC set to  0.000000
5/9/2012	4:01:59 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	4:01:59 PM	Tube furnace set to 750
5/9/2012	4:16:59 PM	H2 valve closed
5/9/2012	4:16:59 PM	BCl3 valve closed
5/9/2012	4:16:59 PM	PH3 valve closed
5/9/2012	4:16:59 PM	SiCl4 pre valve closed
5/9/2012	4:16:59 PM	SiCl4 post valve closed
5/9/2012	4:16:59 PM	Main Vac valve closed
5/9/2012	4:16:59 PM	Bypass valve closed
5/9/2012	4:16:59 PM	Helium valve opened
5/9/2012	4:16:59 PM	Bubbler valve opened
5/9/2012	4:16:59 PM	Helium MFC set to  500.000000
5/9/2012	4:16:59 PM	H2 MFC set to  0.000000
5/9/2012	4:16:59 PM	BCl3 MFC set to  0.000000
5/9/2012	4:16:59 PM	PH3 MFC set to  0.000000
5/9/2012	4:16:59 PM	SiCl4 MFC set to  0.000000
5/9/2012	4:16:59 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	4:17:00 PM	Tube furnace set to 0
5/9/2012	4:37:00 PM	Helium valve closed
5/9/2012	4:37:00 PM	H2 valve closed
5/9/2012	4:37:00 PM	BCl3 valve closed
5/9/2012	4:37:00 PM	PH3 valve closed
5/9/2012	4:37:00 PM	SiCl4 pre valve closed
5/9/2012	4:37:00 PM	SiCl4 post valve closed
5/9/2012	4:37:00 PM	Main Vac valve closed
5/9/2012	4:37:00 PM	Bypass valve closed
5/9/2012	4:37:00 PM	Bubbler valve closed
5/9/2012	4:37:00 PM	Helium MFC set to  0.000000
5/9/2012	4:37:00 PM	H2 MFC set to  0.000000
5/9/2012	4:37:00 PM	BCl3 MFC set to  0.000000
5/9/2012	4:37:00 PM	PH3 MFC set to  0.000000
5/9/2012	4:37:00 PM	SiCl4 MFC set to  0.000000
5/9/2012	4:37:00 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	4:37:00 PM	Tube furnace set to 0
5/9/2012	4:57:00 PM	Helium valve closed
5/9/2012	4:57:00 PM	H2 valve closed
5/9/2012	4:57:00 PM	BCl3 valve closed
5/9/2012	4:57:00 PM	PH3 valve closed
5/9/2012	4:57:00 PM	SiCl4 pre valve closed
5/9/2012	4:57:00 PM	SiCl4 post valve closed
5/9/2012	4:57:00 PM	Main Vac valve closed
5/9/2012	4:57:00 PM	Bubbler valve closed
5/9/2012	4:57:00 PM	Bypass valve opened
5/9/2012	4:57:00 PM	Helium MFC set to  0.000000
5/9/2012	4:57:00 PM	H2 MFC set to  0.000000
5/9/2012	4:57:00 PM	BCl3 MFC set to  0.000000
5/9/2012	4:57:00 PM	PH3 MFC set to  0.000000
5/9/2012	4:57:00 PM	SiCl4 MFC set to  0.000000
5/9/2012	4:57:00 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	4:57:00 PM	Tube furnace set to 0
5/9/2012	4:57:51 PM	Helium valve closed
5/9/2012	4:57:51 PM	H2 valve closed
5/9/2012	4:57:51 PM	BCl3 valve closed
5/9/2012	4:57:51 PM	PH3 valve closed
5/9/2012	4:57:51 PM	SiCl4 pre valve closed
5/9/2012	4:57:51 PM	SiCl4 post valve closed
5/9/2012	4:57:51 PM	Main Vac valve closed
5/9/2012	4:57:51 PM	Bubbler valve closed
5/9/2012	4:57:51 PM	Bypass valve opened
5/9/2012	4:57:51 PM	Helium MFC set to  0.000000
5/9/2012	4:57:51 PM	H2 MFC set to  0.000000
5/9/2012	4:57:51 PM	BCl3 MFC set to  0.000000
5/9/2012	4:57:51 PM	PH3 MFC set to  0.000000
5/9/2012	4:57:51 PM	SiCl4 MFC set to  0.000000
5/9/2012	4:57:51 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	4:57:51 PM	Tube furnace set to 0
5/9/2012	4:58:51 PM	Helium valve closed
5/9/2012	4:58:51 PM	H2 valve closed
5/9/2012	4:58:51 PM	BCl3 valve closed
5/9/2012	4:58:51 PM	PH3 valve closed
5/9/2012	4:58:51 PM	SiCl4 pre valve closed
5/9/2012	4:58:51 PM	SiCl4 post valve closed
5/9/2012	4:58:51 PM	Bypass valve closed
5/9/2012	4:58:51 PM	Bubbler valve closed
5/9/2012	4:58:51 PM	Main Vac valve opened
5/9/2012	4:58:51 PM	Helium MFC set to  0.000000
5/9/2012	4:58:51 PM	H2 MFC set to  0.000000
5/9/2012	4:58:51 PM	BCl3 MFC set to  0.000000
5/9/2012	4:58:51 PM	PH3 MFC set to  0.000000
5/9/2012	4:58:51 PM	SiCl4 MFC set to  0.000000
5/9/2012	4:58:51 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	4:58:51 PM	Tube furnace set to 0
5/9/2012	5:58:52 PM	Run finished at 5:58 PM
5/9/2012	6:57:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2012	6:57:48 PM	Recipe started at 6:57 PM
5/9/2012	6:57:48 PM	Helium valve closed
5/9/2012	6:57:48 PM	H2 valve closed
5/9/2012	6:57:48 PM	BCl3 valve closed
5/9/2012	6:57:48 PM	PH3 valve closed
5/9/2012	6:57:48 PM	SiCl4 pre valve closed
5/9/2012	6:57:48 PM	SiCl4 post valve closed
5/9/2012	6:57:48 PM	Main Vac valve closed
5/9/2012	6:57:48 PM	Bypass valve closed
5/9/2012	6:57:48 PM	Bubbler valve closed
5/9/2012	6:57:48 PM	Helium MFC set to  0.000000
5/9/2012	6:57:48 PM	H2 MFC set to  0.000000
5/9/2012	6:57:48 PM	BCl3 MFC set to  0.000000
5/9/2012	6:57:48 PM	PH3 MFC set to  0.000000
5/9/2012	6:57:48 PM	SiCl4 MFC set to  0.000000
5/9/2012	6:57:48 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	6:57:48 PM	Tube furnace set to 0
5/9/2012	6:57:51 PM	H2 valve closed
5/9/2012	6:57:51 PM	BCl3 valve closed
5/9/2012	6:57:51 PM	PH3 valve closed
5/9/2012	6:57:51 PM	SiCl4 pre valve closed
5/9/2012	6:57:51 PM	SiCl4 post valve closed
5/9/2012	6:57:51 PM	Main Vac valve closed
5/9/2012	6:57:51 PM	Bypass valve closed
5/9/2012	6:57:51 PM	Bubbler valve closed
5/9/2012	6:57:51 PM	Helium valve opened
5/9/2012	6:57:51 PM	Helium MFC set to  500.000000
5/9/2012	6:57:51 PM	H2 MFC set to  0.000000
5/9/2012	6:57:51 PM	BCl3 MFC set to  0.000000
5/9/2012	6:57:51 PM	PH3 MFC set to  0.000000
5/9/2012	6:57:51 PM	SiCl4 MFC set to  0.000000
5/9/2012	6:57:51 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	6:57:51 PM	Tube furnace set to 0
5/9/2012	6:59:01 PM	Helium valve closed
5/9/2012	6:59:01 PM	H2 valve closed
5/9/2012	6:59:01 PM	BCl3 valve closed
5/9/2012	6:59:01 PM	PH3 valve closed
5/9/2012	6:59:01 PM	SiCl4 pre valve closed
5/9/2012	6:59:01 PM	SiCl4 post valve closed
5/9/2012	6:59:01 PM	Main Vac valve closed
5/9/2012	6:59:01 PM	Bypass valve closed
5/9/2012	6:59:01 PM	Bubbler valve closed
5/9/2012	6:59:01 PM	Helium MFC set to  0.000000
5/9/2012	6:59:01 PM	H2 MFC set to  0.000000
5/9/2012	6:59:01 PM	BCl3 MFC set to  0.000000
5/9/2012	6:59:01 PM	PH3 MFC set to  0.000000
5/9/2012	6:59:01 PM	SiCl4 MFC set to  0.000000
5/9/2012	6:59:01 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	6:59:01 PM	Tube furnace set to 0
5/9/2012	6:59:02 PM	Run finished at 6:59 PM
5/9/2012	6:59:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/9/2012	7:05:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2012	7:05:23 PM	Recipe started at 7:05 PM
5/9/2012	7:05:23 PM	Helium valve closed
5/9/2012	7:05:23 PM	H2 valve closed
5/9/2012	7:05:23 PM	BCl3 valve closed
5/9/2012	7:05:23 PM	PH3 valve closed
5/9/2012	7:05:23 PM	SiCl4 pre valve closed
5/9/2012	7:05:23 PM	SiCl4 post valve closed
5/9/2012	7:05:23 PM	Main Vac valve closed
5/9/2012	7:05:23 PM	Bubbler valve closed
5/9/2012	7:05:23 PM	Bypass valve opened
5/9/2012	7:05:23 PM	Helium MFC set to  0.000000
5/9/2012	7:05:23 PM	H2 MFC set to  0.000000
5/9/2012	7:05:23 PM	BCl3 MFC set to  0.000000
5/9/2012	7:05:23 PM	PH3 MFC set to  0.000000
5/9/2012	7:05:23 PM	SiCl4 MFC set to  0.000000
5/9/2012	7:05:23 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	7:05:23 PM	Tube furnace set to 0
5/9/2012	7:06:34 PM	Helium valve closed
5/9/2012	7:06:34 PM	H2 valve closed
5/9/2012	7:06:34 PM	BCl3 valve closed
5/9/2012	7:06:34 PM	PH3 valve closed
5/9/2012	7:06:34 PM	SiCl4 pre valve closed
5/9/2012	7:06:34 PM	SiCl4 post valve closed
5/9/2012	7:06:34 PM	Main Vac valve closed
5/9/2012	7:06:34 PM	Bubbler valve closed
5/9/2012	7:06:34 PM	Bypass valve opened
5/9/2012	7:06:34 PM	Helium MFC set to  0.000000
5/9/2012	7:06:34 PM	H2 MFC set to  0.000000
5/9/2012	7:06:34 PM	BCl3 MFC set to  0.000000
5/9/2012	7:06:34 PM	PH3 MFC set to  0.000000
5/9/2012	7:06:34 PM	SiCl4 MFC set to  0.000000
5/9/2012	7:06:34 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	7:06:34 PM	Tube furnace set to 0
5/9/2012	7:07:34 PM	Helium valve closed
5/9/2012	7:07:34 PM	H2 valve closed
5/9/2012	7:07:34 PM	BCl3 valve closed
5/9/2012	7:07:34 PM	PH3 valve closed
5/9/2012	7:07:34 PM	SiCl4 pre valve closed
5/9/2012	7:07:34 PM	SiCl4 post valve closed
5/9/2012	7:07:34 PM	Bypass valve closed
5/9/2012	7:07:34 PM	Bubbler valve closed
5/9/2012	7:07:34 PM	Main Vac valve opened
5/9/2012	7:07:34 PM	Helium MFC set to  0.000000
5/9/2012	7:07:34 PM	H2 MFC set to  0.000000
5/9/2012	7:07:34 PM	BCl3 MFC set to  0.000000
5/9/2012	7:07:34 PM	PH3 MFC set to  0.000000
5/9/2012	7:07:34 PM	SiCl4 MFC set to  0.000000
5/9/2012	7:07:34 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	7:07:34 PM	Tube furnace set to 0
5/9/2012	7:07:35 PM	Run finished at 7:07 PM
5/9/2012	7:07:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/9/2012	7:08:10 PM	Recipe started at 7:08 PM
5/9/2012	7:08:10 PM	Helium valve closed
5/9/2012	7:08:10 PM	H2 valve closed
5/9/2012	7:08:10 PM	BCl3 valve closed
5/9/2012	7:08:10 PM	PH3 valve closed
5/9/2012	7:08:10 PM	SiCl4 pre valve closed
5/9/2012	7:08:10 PM	SiCl4 post valve closed
5/9/2012	7:08:10 PM	Bypass valve closed
5/9/2012	7:08:10 PM	Bubbler valve closed
5/9/2012	7:08:10 PM	Main Vac valve opened
5/9/2012	7:08:10 PM	Helium MFC set to  0.000000
5/9/2012	7:08:10 PM	H2 MFC set to  0.000000
5/9/2012	7:08:10 PM	BCl3 MFC set to  0.000000
5/9/2012	7:08:10 PM	PH3 MFC set to  0.000000
5/9/2012	7:08:10 PM	SiCl4 MFC set to  0.000000
5/9/2012	7:08:10 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	7:08:10 PM	Tube furnace set to 0
5/9/2012	8:39:10 PM	Helium valve closed
5/9/2012	8:39:10 PM	H2 valve closed
5/9/2012	8:39:10 PM	BCl3 valve closed
5/9/2012	8:39:10 PM	PH3 valve closed
5/9/2012	8:39:10 PM	SiCl4 pre valve closed
5/9/2012	8:39:10 PM	SiCl4 post valve closed
5/9/2012	8:39:10 PM	Main Vac valve closed
5/9/2012	8:39:10 PM	Bypass valve closed
5/9/2012	8:39:10 PM	Bubbler valve closed
5/9/2012	8:39:10 PM	Helium MFC set to  0.000000
5/9/2012	8:39:10 PM	H2 MFC set to  0.000000
5/9/2012	8:39:10 PM	BCl3 MFC set to  0.000000
5/9/2012	8:39:10 PM	PH3 MFC set to  0.000000
5/9/2012	8:39:10 PM	SiCl4 MFC set to  0.000000
5/9/2012	8:39:10 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:39:10 PM	Tube furnace set to 0
5/9/2012	8:39:13 PM	Helium valve closed
5/9/2012	8:39:13 PM	BCl3 valve closed
5/9/2012	8:39:13 PM	PH3 valve closed
5/9/2012	8:39:13 PM	SiCl4 pre valve closed
5/9/2012	8:39:13 PM	SiCl4 post valve closed
5/9/2012	8:39:13 PM	Main Vac valve closed
5/9/2012	8:39:13 PM	Bypass valve closed
5/9/2012	8:39:13 PM	Bubbler valve closed
5/9/2012	8:39:13 PM	H2 valve opened
5/9/2012	8:39:13 PM	Helium MFC set to  0.000000
5/9/2012	8:39:13 PM	H2 MFC set to  500.000000
5/9/2012	8:39:13 PM	BCl3 MFC set to  0.000000
5/9/2012	8:39:13 PM	PH3 MFC set to  0.000000
5/9/2012	8:39:13 PM	SiCl4 MFC set to  0.000000
5/9/2012	8:39:13 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:39:13 PM	Tube furnace set to 0
5/9/2012	8:40:29 PM	Helium valve closed
5/9/2012	8:40:29 PM	BCl3 valve closed
5/9/2012	8:40:29 PM	PH3 valve closed
5/9/2012	8:40:29 PM	SiCl4 pre valve closed
5/9/2012	8:40:29 PM	SiCl4 post valve closed
5/9/2012	8:40:29 PM	Main Vac valve closed
5/9/2012	8:40:29 PM	Bypass valve closed
5/9/2012	8:40:29 PM	H2 valve opened
5/9/2012	8:40:29 PM	Bubbler valve opened
5/9/2012	8:40:29 PM	Helium MFC set to  0.000000
5/9/2012	8:40:29 PM	H2 MFC set to  500.000000
5/9/2012	8:40:29 PM	BCl3 MFC set to  0.000000
5/9/2012	8:40:29 PM	PH3 MFC set to  0.000000
5/9/2012	8:40:29 PM	SiCl4 MFC set to  0.000000
5/9/2012	8:40:29 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:40:29 PM	Tube furnace set to 0
5/9/2012	8:40:30 PM	Helium valve closed
5/9/2012	8:40:30 PM	BCl3 valve closed
5/9/2012	8:40:30 PM	PH3 valve closed
5/9/2012	8:40:30 PM	SiCl4 pre valve closed
5/9/2012	8:40:30 PM	SiCl4 post valve closed
5/9/2012	8:40:30 PM	Main Vac valve closed
5/9/2012	8:40:30 PM	Bypass valve closed
5/9/2012	8:40:30 PM	H2 valve opened
5/9/2012	8:40:30 PM	Bubbler valve opened
5/9/2012	8:40:30 PM	Helium MFC set to  0.000000
5/9/2012	8:40:30 PM	H2 MFC set to  500.000000
5/9/2012	8:40:30 PM	BCl3 MFC set to  0.000000
5/9/2012	8:40:30 PM	PH3 MFC set to  0.000000
5/9/2012	8:40:30 PM	SiCl4 MFC set to  0.000000
5/9/2012	8:40:30 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	8:40:31 PM	Tube furnace set to 1000
5/9/2012	9:05:30 PM	Helium valve closed
5/9/2012	9:05:30 PM	PH3 valve closed
5/9/2012	9:05:30 PM	Main Vac valve closed
5/9/2012	9:05:30 PM	Bypass valve closed
5/9/2012	9:05:30 PM	H2 valve opened
5/9/2012	9:05:30 PM	BCl3 valve opened
5/9/2012	9:05:30 PM	SiCl4 pre valve opened
5/9/2012	9:05:30 PM	SiCl4 post valve opened
5/9/2012	9:05:30 PM	Bubbler valve opened
5/9/2012	9:05:31 PM	Helium MFC set to  0.000000
5/9/2012	9:05:31 PM	H2 MFC set to  450.000000
5/9/2012	9:05:31 PM	BCl3 MFC set to  1.000000
5/9/2012	9:05:31 PM	PH3 MFC set to  0.000000
5/9/2012	9:05:31 PM	SiCl4 MFC set to  50.000000
5/9/2012	9:05:31 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	9:05:31 PM	Tube furnace set to 1000
5/9/2012	9:38:31 PM	Helium valve closed
5/9/2012	9:38:31 PM	BCl3 valve closed
5/9/2012	9:38:31 PM	Main Vac valve closed
5/9/2012	9:38:31 PM	Bypass valve closed
5/9/2012	9:38:31 PM	H2 valve opened
5/9/2012	9:38:31 PM	PH3 valve opened
5/9/2012	9:38:31 PM	SiCl4 pre valve opened
5/9/2012	9:38:31 PM	SiCl4 post valve opened
5/9/2012	9:38:31 PM	Bubbler valve opened
5/9/2012	9:38:31 PM	Helium MFC set to  0.000000
5/9/2012	9:38:31 PM	H2 MFC set to  430.000000
5/9/2012	9:38:31 PM	BCl3 MFC set to  0.000000
5/9/2012	9:38:31 PM	PH3 MFC set to  20.000000
5/9/2012	9:38:31 PM	SiCl4 MFC set to  50.000000
5/9/2012	9:38:31 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	9:38:31 PM	Tube furnace set to 1000
5/9/2012	9:40:31 PM	Helium valve closed
5/9/2012	9:40:31 PM	BCl3 valve closed
5/9/2012	9:40:31 PM	PH3 valve closed
5/9/2012	9:40:31 PM	SiCl4 pre valve closed
5/9/2012	9:40:31 PM	SiCl4 post valve closed
5/9/2012	9:40:31 PM	Main Vac valve closed
5/9/2012	9:40:31 PM	Bypass valve closed
5/9/2012	9:40:31 PM	H2 valve opened
5/9/2012	9:40:31 PM	Bubbler valve opened
5/9/2012	9:40:31 PM	Helium MFC set to  0.000000
5/9/2012	9:40:31 PM	H2 MFC set to  500.000000
5/9/2012	9:40:31 PM	BCl3 MFC set to  0.000000
5/9/2012	9:40:31 PM	PH3 MFC set to  0.000000
5/9/2012	9:40:31 PM	SiCl4 MFC set to  0.000000
5/9/2012	9:40:31 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	9:40:31 PM	Tube furnace set to 750
5/9/2012	9:55:31 PM	H2 valve closed
5/9/2012	9:55:31 PM	BCl3 valve closed
5/9/2012	9:55:31 PM	PH3 valve closed
5/9/2012	9:55:31 PM	SiCl4 pre valve closed
5/9/2012	9:55:31 PM	SiCl4 post valve closed
5/9/2012	9:55:31 PM	Main Vac valve closed
5/9/2012	9:55:31 PM	Bypass valve closed
5/9/2012	9:55:31 PM	Helium valve opened
5/9/2012	9:55:31 PM	Bubbler valve opened
5/9/2012	9:55:31 PM	Helium MFC set to  500.000000
5/9/2012	9:55:31 PM	H2 MFC set to  0.000000
5/9/2012	9:55:31 PM	BCl3 MFC set to  0.000000
5/9/2012	9:55:31 PM	PH3 MFC set to  0.000000
5/9/2012	9:55:31 PM	SiCl4 MFC set to  0.000000
5/9/2012	9:55:31 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	9:55:31 PM	Tube furnace set to 0
5/9/2012	10:15:31 PM	Helium valve closed
5/9/2012	10:15:31 PM	H2 valve closed
5/9/2012	10:15:31 PM	BCl3 valve closed
5/9/2012	10:15:31 PM	PH3 valve closed
5/9/2012	10:15:31 PM	SiCl4 pre valve closed
5/9/2012	10:15:31 PM	SiCl4 post valve closed
5/9/2012	10:15:31 PM	Main Vac valve closed
5/9/2012	10:15:31 PM	Bypass valve closed
5/9/2012	10:15:31 PM	Bubbler valve closed
5/9/2012	10:15:31 PM	Helium MFC set to  0.000000
5/9/2012	10:15:31 PM	H2 MFC set to  0.000000
5/9/2012	10:15:31 PM	BCl3 MFC set to  0.000000
5/9/2012	10:15:31 PM	PH3 MFC set to  0.000000
5/9/2012	10:15:31 PM	SiCl4 MFC set to  0.000000
5/9/2012	10:15:31 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:15:31 PM	Tube furnace set to 0
5/9/2012	10:35:31 PM	Helium valve closed
5/9/2012	10:35:31 PM	H2 valve closed
5/9/2012	10:35:31 PM	BCl3 valve closed
5/9/2012	10:35:31 PM	PH3 valve closed
5/9/2012	10:35:31 PM	SiCl4 pre valve closed
5/9/2012	10:35:31 PM	SiCl4 post valve closed
5/9/2012	10:35:31 PM	Main Vac valve closed
5/9/2012	10:35:31 PM	Bubbler valve closed
5/9/2012	10:35:31 PM	Bypass valve opened
5/9/2012	10:35:31 PM	Helium MFC set to  0.000000
5/9/2012	10:35:31 PM	H2 MFC set to  0.000000
5/9/2012	10:35:31 PM	BCl3 MFC set to  0.000000
5/9/2012	10:35:31 PM	PH3 MFC set to  0.000000
5/9/2012	10:35:31 PM	SiCl4 MFC set to  0.000000
5/9/2012	10:35:31 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:35:32 PM	Tube furnace set to 0
5/9/2012	10:36:24 PM	Helium valve closed
5/9/2012	10:36:24 PM	H2 valve closed
5/9/2012	10:36:24 PM	BCl3 valve closed
5/9/2012	10:36:24 PM	PH3 valve closed
5/9/2012	10:36:24 PM	SiCl4 pre valve closed
5/9/2012	10:36:24 PM	SiCl4 post valve closed
5/9/2012	10:36:24 PM	Main Vac valve closed
5/9/2012	10:36:24 PM	Bubbler valve closed
5/9/2012	10:36:24 PM	Bypass valve opened
5/9/2012	10:36:24 PM	Helium MFC set to  0.000000
5/9/2012	10:36:24 PM	H2 MFC set to  0.000000
5/9/2012	10:36:24 PM	BCl3 MFC set to  0.000000
5/9/2012	10:36:24 PM	PH3 MFC set to  0.000000
5/9/2012	10:36:24 PM	SiCl4 MFC set to  0.000000
5/9/2012	10:36:24 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:36:24 PM	Tube furnace set to 0
5/9/2012	10:37:24 PM	Helium valve closed
5/9/2012	10:37:24 PM	H2 valve closed
5/9/2012	10:37:24 PM	BCl3 valve closed
5/9/2012	10:37:24 PM	PH3 valve closed
5/9/2012	10:37:24 PM	SiCl4 pre valve closed
5/9/2012	10:37:24 PM	SiCl4 post valve closed
5/9/2012	10:37:24 PM	Bypass valve closed
5/9/2012	10:37:24 PM	Bubbler valve closed
5/9/2012	10:37:24 PM	Main Vac valve opened
5/9/2012	10:37:24 PM	Helium MFC set to  0.000000
5/9/2012	10:37:24 PM	H2 MFC set to  0.000000
5/9/2012	10:37:24 PM	BCl3 MFC set to  0.000000
5/9/2012	10:37:24 PM	PH3 MFC set to  0.000000
5/9/2012	10:37:24 PM	SiCl4 MFC set to  0.000000
5/9/2012	10:37:24 PM	Bypass solenoid MFC set to  0.000000
5/9/2012	10:37:24 PM	Tube furnace set to 0
5/9/2012	11:37:24 PM	Run finished at 11:37 PM
